An electrostatic vertical microscanner for phase modulating array-type Mirau microinterferometry
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Journal of Micromechanics and Microengineering
سال: 2015
ISSN: 0960-1317,1361-6439
DOI: 10.1088/0960-1317/25/11/115013